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Keithley 4200A-SCS Parameter Analyzer

Keithley 4200A-SCS Parameter Analyzer

Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS. The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.

Keithley 4200A-SCS Parameter Analyzer

Key Performance Specifications
I-V Source Measure Units (SMUs)
• ±210 V/100 mA or ±210 V/1 A modules
• 100 fA measure resolution
• 10 aA measure resolution with optional preamp
• 10 mHz – 10 Hz very low frequency capacitance
measurements
• 100 µF load capacitance
• 4-quadrant operation
• 2 or 4-wire connections
C-V Multi-frequency Capacitance Units (CVUs)
• AC impedance measurements (C-V, C-f, C-t)
• 1 kHz – 10 MHz frequency range
• ±30 V (60 V differential) built-in DC bias, expandable
to ±210 V (420 V differential)
• Simple switching between I-V and C-V
measurements with the optional CVIV Multi-Switch
Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)
• Two independent or synchronized channels of
high-speed pulsed I-V source and measure
• 200 MS/s, 5 ns sampling rate
• ±40 V (80 Vp-p), ±800 mA
• Transient waveform capture mode
• Arbitrary waveform generator for multi-level pulse
waveform with 10 ns programmable resolution
High Voltage Pulse Generator Unit (PGU)
• Two channels of high-speed pulsed V source
• ±40 V (80 Vp-p ), ±800 mA
• Arbitrary waveform generator Segment ARB®
mode for multi-level pulse waveform with 10 ns
programmable resolution
I-V/C-V Multi-Switch Module (CVIV)
• Easily switch between I-V and C-V measurements
without re-cabling or lifting prober needles
• Move the C-V measurement to any terminal without
re-cabling or lifting prober needles
• ±210 V DC bias capable
Remote Preamplifier/Switch Module (RPM)
• Automatically switches between I-V, C-V, and
ultra-fast pulsed I-V measurements
• Extends current sensitivity of the 4225-PMU
to tens of picoamps
• Reduces cable capacitance effects